Subject heading |
Sputtern |
|---|---|
Synonym |
Festkörperzerstäubung
Ionenzerstäubung Ionstrahlsputtern Kathodenzerstäubung
Sputtering
Ionenstrahlsputtern Sputterdeposition Sputterverfahren |
Broader term |
|
Topic |
|
Source |
- Kompakt B, Nachtrag,B 1986 als Kathodenzerstäubung |
Record type |
|
GND-Identifier |
4182614-0 |
Record ID |
041826140 |
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