Subject heading |
Lithografie (Halbleitertechnologie) |
|---|---|
Synonym |
Lithographie (Halbleitertechnologie)
Halbleiter / Lithografie Mikrolithographie Mikrolithografie
Mikrostrukturierung (Halbleitertechnologie)
Microlithography |
Related |
Lithografieoptik (verwandter Begriff) |
Topic |
|
Source |
B 1986 |
Record type |
|
GND-Identifier |
4191584-7 |
Record ID |
041915844 |
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