Subject heading |
Mikromechanik |
---|---|
Definition |
Anwendung d. technolog. Methoden d. Mikroelektronik z. Herstellung v. Mikrobauteilen f. Mechanik, Pneumatik, Optik etc. u. Mechanisches Verhalten von Mikrogefügen |
Synonym |
Mikrostrukturierung (Mikromechanik) |
Broader term |
|
Related |
Nanotechnologie (verwandter Begriff) |
Topic |
Elektronik, Nachrichtentechnik |
Source |
Lex. Elektronik Mikroelektronik |
Record type |
Subject heading |
GND-Identifier |
4205811-9 |
Record ID |
042058112 |
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