Subject heading |
Substrat (Mikroelektronik) |
|---|---|
Synonym |
Trägermaterial (Mikroelektronik) |
Topic |
|
Source |
abc-Physik, ZDE-Thes. |
Record type |
|
GND-Identifier |
4229622-5 |
Record ID |
042296226 |
|
Topic of
|
|
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