Title |
Rare-earth implanted MOS devices for silicon photonics : microstructural, electrical and optoelectronic properties / Lars Rebohle ; Wolfgang Skorupa |
|---|---|
Involved |
Lars Rebohle (Verfasser) |
Published |
Berlin, Heidelberg: Springer |
Extent |
XVIII, 173 S. : Ill., graph. Darst. |
ISBN |
978-3-642-26558-7 |
Language |
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Country |
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Topic |
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Subject |
MOS, Seltenerdmetall, Siliciumdioxid, Ionenimplantation, Elektrolumineszenz, Photonik |
DDC notation |
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Series |
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Other editions |
Erscheint auch als Online-Ausgabe: Rare-Earth Implanted MOS Devices for Silicon Photonics : Microstructural, Electrical and Optoelectronic Properties |
Further information |
Literaturangaben |
Record ID |
1003553087 |
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