Title |
Thin films of copper oxide and copper grown by atomic layer deposition for applications in metallization systems of microelectronic devices / Thomas Wächtler |
|---|---|
Involved |
Thomas Wächtler (Verfasser) |
Published |
Chemnitz: Univ.-Verl. |
Extent |
245 S. : Ill., graph. Darst. |
Thesis |
Zugl.: Chemnitz, Techn. Univ., Diss., 2010 |
ISBN |
978-3-941003-17-0 |
Language |
|
Country |
|
Topic |
|
Subject |
Kupfer, Kupferoxide, Dünne Schicht, Atomlagenabscheidung, Metallisieren |
DDC notation |
|
Record ID |
1004937253 |
Please note
The beta version does not yet contain all functions and information of the DNB portal catalogue. If you are missing information or want to order a medium, please visit the page in the DNB portal catalogue via the following link: