Title |
AlGaN-GaN-Schichtsysteme für piezoelektrisch angeregte Resonatoren / von Katja Tonisch. [Technische Universität Ilmenau] |
|---|---|
Involved |
Katja Tonisch (Verfasser) |
Published |
Ilmenau: Techn. Univ., Univ.-Bibliothek |
Edition |
[Online-Ausg.] |
Extent |
Online-Ressource |
Thesis |
Zugl.: Ilmenau, Techn. Univ., Diss., 2009 |
ISBN |
978-3-939473-72-5 |
Language |
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Country |
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Topic |
|
Subject |
MEMS, Resonator, Galliumnitrid, Piezoelektrischer Stoff, Heterostruktur-Bauelement, MOCVD-Verfahren |
DDC notation |
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Persistent identifier |
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Record ID |
1007338954 |
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