Title |
Rare-Earth Implanted MOS Devices for Silicon Photonics : Microstructural, Electrical and Optoelectronic Properties |
|---|---|
Involved |
Lars Rebohle (Verfasser) |
Published |
Berlin, Heidelberg: Springer Berlin Heidelberg |
Extent |
Online-Ressource |
ISBN |
978-3-642-14447-9 |
Country |
|
Topic |
|
Subject |
MOS, Seltenerdmetall, Siliciumdioxid, Ionenimplantation, Elektrolumineszenz, Photonik |
DDC notation |
|
Series |
Springer Series in Materials Science |
Other editions |
Erscheint auch als Druck-Ausgabe: Rare-earth implanted MOS devices for silicon photonics : microstructural, electrical and optoelectronic properties |
Persistent identifier |
urn:nbn:de:1111-20101019281 (URN) |
Further information |
Lizenzpflichtig |
Record ID |
1007704284 |
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