Title |
Semiconductor-On-Insulator Materials for Nanoelectronics Applications |
|---|---|
Involved |
Alexei Nazarov (Herausgeber) |
Published |
Berlin, Heidelberg: Springer Berlin Heidelberg |
Extent |
Online-Ressource |
ISBN |
978-3-642-15868-1 |
Country |
|
Topic |
|
Subject |
Nanoelektronik, SOI-Technik, Halbleitersubstrat, MOS-FET, CMOS, MEMS, Aufsatzsammlung |
DDC notation |
|
Other editions |
Erscheint auch als Druck-Ausgabe: Semiconductor-on-insulator materials for nanoelectronics applications |
Persistent identifier |
urn:nbn:de:1111-20110303307 (URN) |
Further information |
Lizenzpflichtig |
Record ID |
1010346911 |
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