Title |
Interface-phenomena in 3C-SiC heteroepitaxy on silicon / Philip Hens |
|---|---|
Involved |
Philip Hens (Verfasser) |
Published |
Aachen: Shaker |
Extent |
160 S. : Ill., graph. Darst. |
Thesis |
Erlangen, Nürnberg, Univ., Diss., 2011 |
ISBN |
978-3-8440-0179-2 |
Language |
|
Country |
|
Topic |
|
Subject |
Siliciumcarbid, Heteroepitaxie, Silicium, Halbleitersubstrat |
DDC notation |
|
Series |
Berichte aus der Halbleitertechnik |
Other editions |
Erscheint auch als Online-Ausgabe: Interface-Phenomena in 3C-SiC Heteroepitaxy on Silicon |
Record ID |
1014094542 |
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