Title |
Bio and nano packaging techniques for electron devices : advances in electronic device packaging / Gerald Gerlach ; Klaus-Jürgen Wolter ed. |
|---|---|
Involved |
Gerald Gerlach (Herausgeber) |
Published |
Berlin, Heidelberg: Springer |
Extent |
XII, 628 S. : Ill., graph. Darst. |
ISBN |
978-3-642-28521-9 |
Language |
|
Country |
|
Topic |
Elektrotechnik, Elektronik |
Subject |
Halbleitergehäuse, Verbindungstechnik, Dreidimensionale Integration, Nanolithografie, Nanobiotechnologie, Nanoelektromechanik, MEMS, Aufsatzsammlung |
DDC notation |
|
Other editions |
Erscheint auch als Online-Ausgabe: Bio and Nano Packaging Techniques for Electron Devices : Advances in Electronic Device Packaging |
Further information |
Literaturangaben |
Record ID |
1019494271 |
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