Title |
Design of an interferometric test station for parallel inspection of MEMS / Christoph Schäffel ; Steffen Michael, ; Roman Paris ; Astrid Frank ; Norbert Zeike ; Kay Gastinger ; M. Kujawinska ; U. Zeitner ; S. Beer. Universitätsbibliothek <Ilmenau> / ilmedia |
|---|---|
Involved |
Christoph Schäffel (Mitwirkender)
Steffen Michael, (Mitwirkender) Roman Paris (Mitwirkender) Astrid Frank (Mitwirkender)
Norbert Zeike (Mitwirkender)
Kay Gastinger (Mitwirkender) M. Kujawinska (Mitwirkender) U. Zeitner (Mitwirkender) S. Beer (Mitwirkender) Universitätsbibliothek (Ilmenau). ilmedia (Sonstige) |
Published |
Ilmenau: Universitätsbibliothek Ilmenau |
Extent |
Online-Ressource |
Language |
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Country |
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Topic |
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Series |
International scientific colloquium / Ilmenau University of Technology ; 56 |
Part of |
Innovation in mechanical engineering - shaping the future : proceedings ; 1.3.[11] |
Persistent identifier |
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Record ID |
1023712911 |
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