Title |
3D-probing systems for micro-components / Thomas Liebrich |
|---|---|
Involved |
Thomas Liebrich (Verfasser) |
Published |
Düsseldorf: VDI-Verl. |
Edition |
Als Ms. gedr. |
Extent |
XVI, 128 S. : Ill., graph. Darst. |
Thesis |
Zugl.: Zürich, Techn. Hochsch., Diss., 2012 |
ISBN |
978-3-18-521208-6 |
Language |
|
Country |
|
Topic |
|
Subject |
Mikrosystemtechnik, Koordinatenmessgerät, Taktiler Sensor, Kapazitiver Sensor, Geräteentwicklung |
DDC notation |
|
Series |
Zürcher Schriften zur Produktionstechnik |
Record ID |
102487236X |
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