Title |
Fabrication and characterization of self-sensing and self-actuating piezoresistive microscale silicon cantilevers for an integrated scanning probe microscopy and scanning electron microscopy system / Ute Wenzel. Gutachter: D. Frank Ogletree ; Teodor P. Gotszalk. Betreuer: Ivo W. Rangelow |
|---|---|
Involved |
Ute Wenzel (Verfasser) |
Published |
Ilmenau: Universitätsbibliothek Ilmenau |
Extent |
Online-Ressource |
Thesis |
Ilmenau, Technische Universität Ilmenau, Diss., 2012 |
Language |
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Country |
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Topic |
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Subject |
self-sensing
self-actuation piezoresistive cantilever AFM
SEM
SPM integrated system |
DDC notation |
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Other editions |
Erscheint auch als Druck-Ausgabe: Fabrication and characterization of self-sensing and self-actuating piezoresistive microscale silicon cantilevers for an integrated scanning probe microscopy and scanning electron microscopy system |
Persistent identifier |
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Record ID |
1034527770 |
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