Title |
Modeling and optimization methods of an electrostatically driven MEMS speaker / David Tumpold |
|---|---|
Involved |
David Tumpold (Verfasser) |
Published |
Aachen: Shaker |
Extent |
IV, 201 S. : Ill., graph. Darst. |
Thesis |
Zugl.: Wien, Techn. Univ., Diss., 2014 |
ISBN |
978-3-8440-2697-9 |
Language |
|
Country |
|
Topic |
|
Subject |
MEMS, Mikrofon, Siliciumbauelement, Elektrostatischer Lautsprecher, Akustische Signalverarbeitung, Schalldruckpegel, Schallerzeugung, Akustisches Wellenfeld, Finite-Elemente-Methode |
DDC notation |
|
Series |
Measurement-, actuator-, and simulation-technology |
Other editions |
Erscheint auch als Online-Ausgabe: Modeling and Optimization Methods of an Electrostatically driven MEMS Speaker |
Record ID |
1048485285 |
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