Title |
Pattern formation on Si surfaces by low-energy ion beam erosion / Marina Inés Cornejo. Betreuer: Frank Mücklich |
|---|---|
Involved |
Marina Inés Cornejo (Verfasser) |
Published |
Saarbrücken: Saarländische Universitäts- und Landesbibliothek |
Extent |
Online-Ressource |
Thesis |
Saarbrücken, Universität des Saarlandes, Diss., 2011 |
Language |
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Country |
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Topic |
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Subject |
Silicium, Oberflächenbehandlung, Breitstrahl-Ionenquelle, Musterbildung, Nanostruktur |
DDC notation |
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Persistent identifier |
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Record ID |
1051326745 |
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