Title |
Modellierung und Simulation eines plasma-ionengestützten Beschichtungsprozesses / Benjamin Schröder |
|---|---|
Involved |
Benjamin Schröder (Verfasser) |
Published |
[Göttingen]: Sierke |
Edition |
1. Aufl. |
Extent |
IV, 140 S. |
Thesis |
Zugl.: Bochum, Univ., Diss., 2014 |
ISBN |
978-3-86844-617-3 |
Language |
|
Country |
|
Topic |
|
Subject |
|
DDC notation |
|
Record ID |
1052213472 |
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