Title |
Micro and nano fabrication : tools and processes / Hans H. Gatzen ; Volker Saile ; Juerg Leuthold. With a foreward and an introd. by Richard S. Muller |
|---|---|
Involved |
Hans-Heinrich Gatzen (Verfasser) |
Published |
Heidelberg, New York, NY, Dordrecht, London, Berlin: Springer |
Extent |
XXVI, 519 S. : Ill., graph. Darst. |
ISBN |
978-3-662-44394-1 |
Language |
|
Country |
|
Topic |
Elektrotechnik, Elektronik |
Subject |
MEMS, Nanoelektromechanik, Mikrosystemtechnik, Dünnschichttechnik, Mikrofertigung, Nanotechnologie |
DDC notation |
|
Other editions |
Erscheint auch als Online-Ausgabe: Micro and Nano Fabrication Technology |
Further information |
Literaturangaben |
Record ID |
1053676468 |
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