Title |
Konzeption und Aufbau des Positronenstrahlsystems MePS, PAS-Messungen an porösen low-k-Schichten / Marco Jungmann. Betreuer: R. Krause-Rehberg ; E. Zschech ; H. Leipner |
|---|---|
Involved |
Marco Jungmann (Verfasser) |
Published |
Halle, Saale: Universitäts- und Landesbibliothek Sachsen-Anhalt |
Extent |
Online-Ressource |
Thesis |
Halle (Saale), Universitäts- und Landesbibliothek Sachsen-Anhalt, Diss., 2015 |
Language |
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Country |
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Topic |
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Subject |
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Persistent identifier |
urn:nbn:de:gbv:3:4-15111 (URN) |
Record ID |
1076038581 |
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