Title |
Magnetron-gesputterte superharte, amorphe Kohlenstoffschichten mit gradiertem Schichtaufbau / Michael Stüber |
|---|---|
Involved |
Michael Stüber (Verfasser) |
Published |
Karlsruhe: KIT-Bibliothek |
Extent |
Online-Ressource |
Thesis |
Dissertation, Karlsruhe, Universität Karlsruhe, 1997 |
Language |
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Country |
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Topic |
|
Subject |
|
Series |
Wissenschaftliche Berichte. FZKA ; 5919 |
Persistent identifier |
|
Record ID |
1103572261 |
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