Title |
Structural and optical properties of PECVD grown silicon nanocrystals embedded in SiOxNy matrix = Strukturelle und Optische Eigenschaften mittels PECVD hergestellter Silicium Nanokristalle |
|---|---|
Involved |
Andreas Markus Hartel (Verfasser) |
Published |
Freiburg: Universität |
Extent |
Online-Ressource |
Thesis |
Dissertation, Universität Freiburg, 2013 |
Language |
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Country |
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Topic |
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Subject |
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Persistent identifier |
urn:nbn:de:bsz:25-opus-91480 (URN) |
Record ID |
1114995673 |
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