Title |
Laser-induced local dehydroxylation on surface-oxidized silicon substrates: mechanistic aspects and prospects in nanofabrication |
|---|---|
Involved |
Nils Hartmann (Verfasser)
Benjamin Klingebiel (Sonstige) Thorsten Balgar (Sonstige) Steffen Franzka (Sonstige)
Eckart Hasselbrink (Sonstige)
SpringerLink (Online service) (Sonstige) |
Published in |
Applied physics. A, Materials science & processing 94, 1, 1.11.2008, date:1.2009, Seite 95-103 |
Published |
2008 |
Language |
|
Country |
|
Subject |
Physics.
Condensed Matter Physics. Optical and Electronic Materials. Nanotechnology.
Characterization and Evaluation of Materials.
Surfaces and Interfaces, Thin Films. Operating Procedures, Materials Treatment. |
Persistent identifier |
urn:nbn:de:1111-201610204849 (URN) |
Record ID |
1116663198 |
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