Title |
Investigation of a magnetron enhanced AF plasma polymerization process for sensor coating = Untersuchung eines Magnetron-Angereicherten AF Plasma-Polymerisationsprozesses für Sensorbeschichtung |
|---|---|
Involved |
Loïc Ledernez (Verfasser) |
Published |
Freiburg: Universität |
Extent |
Online-Ressource |
Thesis |
Dissertation, Albert-Ludwigs-Universität Freiburg, 2011 |
Language |
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Country |
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Topic |
|
Subject |
Gasentladung |
Persistent identifier |
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Record ID |
1123463263 |
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