Title |
Scanning probe-based high-accuracy overlay alignment concept for lithography applications |
|---|---|
Involved |
Valentyn Ishchuk (Verfasser)
Elshad Guliyev (Sonstige) Cemal Aydogan (Sonstige) Ivan Buliev (Sonstige)
Marcus Kästner (Sonstige)
Tzvetan Ivanov (Sonstige) Ahmad Ahmad (Sonstige) Alexander Reum (Sonstige) Steve Lenk (Sonstige) Claudia Lenk (Sonstige) Nikolay Nikolov (Sonstige) Thomas Glinsner (Sonstige) Ivo W. Rangelow (Sonstige) SpringerLink (Online service) (Sonstige) |
Published in |
Applied physics. A, Materials science & processing 123, 1, 26.12.2016, date:1.2017, Seite 1-12 |
Published |
2016 |
Language |
|
Country |
|
Topic |
|
Subject |
Physics.
Condensed Matter Physics. Optical and Electronic Materials. Nanotechnology.
Characterization and Evaluation of Materials.
Surfaces and Interfaces, Thin Films. Operating Procedures, Materials Treatment. |
Persistent identifier |
urn:nbn:de:1111-201701244385 (URN) |
Record ID |
1124003789 |
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