Title |
Investigation of industrially-suited processes for deposition of oxide thin films by high power impulse magnetron sputtering / von Felipe de Campos Carreri |
|---|---|
Involved |
Felipe de Campos Carreri (Verfasser) |
Published |
Stuttgart: Fraunhofer Verlag |
Extent |
XV, 196 Seiten : Illustrationen |
Thesis |
Dissertation, Technische Universität Carolo-Wilhelmina zu Braunschweig, 2017 |
ISBN |
978-3-8396-1287-3 |
Language |
|
Country |
|
Topic |
Industrielle und handwerkliche Fertigung |
Subject |
Hochleistungsimpulsmagnetronsputtern, Dünne Schicht, Oxidschicht, Isolierschicht, Aluminiumoxide, Transparent-leitendes Oxid, Indiumoxide, Zinnoxide, Zinkoxid, Prozessführung (Technik) |
DDC notation |
|
Series |
|
Record ID |
1153421992 |
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