Title |
Beugungslithographie zur Fertigung optischer Nanostrukturen / von Dipl.-Phys. Lorenz Stürzebecher |
|---|---|
Involved |
Lorenz Stürzebecher (Verfasser) |
Published |
Jena |
Extent |
115 Blätter : Illustrationen |
Thesis |
Dissertation, Friedrich-Schiller-Universität Jena, 2015 |
Language |
|
Country |
|
Topic |
|
Subject |
Optische Schicht, Nanostruktur, Lithografie (Halbleitertechnologie) |
Record ID |
1162957158 |
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