Title |
Hyperdoping Si with deep-level impurities by ion implantation and sub-second annealing / von Fang Liu |
|---|---|
Involved |
Fang Liu (Verfasser) |
Published |
Dresden |
Extent |
viii, 91 Seiten : Illustrationen |
Thesis |
Dissertation, Technische Universität Dresden, 2018 |
Language |
|
Country |
|
Topic |
|
Subject |
Silicium, Dotierung, Übersättigung, Ionenimplantation, Ausheilung |
Other editions |
Erscheint auch als Online-Ausgabe: Hyperdoping Si with deep-level impurities by ion implantation and sub-second annealing |
Record ID |
1164522159 |
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