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Merlin Mikulewitsch, Matthias Marcus Auerswald, Axel von Freyberg et al.

Geometry Measurement of Submerged Metallic Micro-Parts Using Confocal Fluorescence Microscopy

Published in: Nanomanufacturing and metrology 1, 3, 10.7.2018, date:9.2018

Title

Geometry Measurement of Submerged Metallic Micro-Parts Using Confocal Fluorescence Microscopy

Involved 

Merlin Mikulewitsch (Verfasser)
Matthias Marcus Auerswald (Sonstige)
Axel von Freyberg (Sonstige)
Andreas Fischer (Sonstige)
SpringerLink (Online service) (Sonstige)

Published in

Nanomanufacturing and metrology 1, 3, 10.7.2018, date:9.2018, Seite 171-179

Published

2018

Language

Englisch

Country

Singapur

Topic

Industrielle und handwerkliche Fertigung

Subject

Engineering.
Nanotechnology and Microengineering.
Nanotechnology.
Manufacturing, Machines, Tools.

Persistent identifier

urn:nbn:de:101:1-2018090308295854514759 (URN)
10.1007/s41871-018-0019-6 (DOI)

Record ID

1166065405
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