Title |
Characterization and Modeling of Si-Si Bonded Hydrophobic Interfaces for Novel High-Power BIMOS Devices / Dirk O Detjen |
|---|---|
Involved |
Dirk O. Detjen (Verfasser) |
Published |
Aachen: Shaker |
Edition |
1. Auflage |
Extent |
Online-Ressource, 143 Seiten : 78 Illustrationen |
Thesis |
Dissertation, Rheinisch-Westfälische Technische Hochschule Aachen, 2004 |
ISBN |
978-3-8322-2963-4 |
Language |
|
Country |
|
Topic |
|
Subject |
Leistungsthyristor, BIMOS, Wafer, Bonden, Oberflächeneigenschaft, Hydrophiles Verhalten |
Series |
Aachener Beiträge des ISEA ; 37 |
Other editions |
Erscheint auch als Druck-Ausgabe: Characterization and modeling of Si-Si bonded hydrophobic interfaces for novel high power BIMOS devices |
Persistent identifier |
|
Further information |
Lizenzpflichtig |
Record ID |
1170539580 |
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