Title |
Monte Carlo simulations concerning elastic scattering with application to DC and high power pulsed magnetron sputtering for Ti₃SiC₂ / Jürgen Geiser, Sven Blankenburg |
|---|---|
Involved |
Jürgen Geiser (Verfasser) |
Published |
Berlin: Humboldt-Universität zu Berlin |
Extent |
Online-Ressource |
Language |
|
Country |
|
Topic |
|
Subject |
DC sputtering
High power pulsed magnetron sputtering MAX-phases mean free path
scattering angle probability distribution
moving targets Particle-In-Cell-Monte-Carlo-Collisions PIC-MCC Monte-Carlo-Markov-Chain |
DDC notation |
|
Series |
Preprints aus dem Institut für Mathematik ; 20 |
Persistent identifier |
urn:nbn:de:kobv:11-100193115 (URN) |
Record ID |
1182996779 |
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