Title |
In situ investigation of production processes in a large chamber scanning electron microscope / Anke Aretz, Lisa Christine Ehle, André Häusler, Kirsten Bobzin, Mehmet Öte, Stefanie Wiesner, Alexander Schmidt, Arnold Gillner, Reinhart Poprawe, Joachim Mayer |
|---|---|
Involved |
Anke Aretz (Verfasser)
Lisa Christine Ehle (Verfasser) André Häusler (Verfasser) Kirsten Bobzin (Verfasser)
Mehmet Öte (Verfasser)
Stefanie Wiesner (Verfasser) Alexander Schmidt (Verfasser) Arnold Gillner (Verfasser) Reinhart Poprawe (Verfasser) Joachim Mayer (Verfasser) |
Published |
Aachen: Universitätsbibliothek der RWTH Aachen |
Extent |
Online-Ressource |
Language |
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Country |
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Topic |
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Persistent identifier |
urn:nbn:de:101:1-2019060306260217116775 (URN) |
Further information |
In: 10.1016/j.ultramic.2018.07.002 |
Record ID |
118766247X |
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