Title |
An Ultra-thin CMOS Sensor for In-plane Stress Sensing / Yiğit Uygar Mahsereci |
|---|---|
Involved |
Yiğit Uygar Mahsereci (Verfasser) |
Published |
Aachen: Shaker |
Edition |
1. Auflage |
Extent |
Online-Ressource, 164 Seiten : 52 Illustrationen |
Thesis |
Dissertation, Universität Stuttgart, 2018 |
ISBN |
978-3-8440-6513-8 |
Language |
|
Country |
|
Topic |
|
Subject |
Chip, Silicium, Dünne Schicht, CMOS, Mixed-Signal-Schaltung, Folie, Mechanische Spannung, Biegung, Sensor, Temperaturkompensation |
DDC notation |
|
Series |
Berichte aus der Elektronik |
Other editions |
Erscheint auch als Druck-Ausgabe: An ultra-thin CMOS sensor for in-plane stress sensing |
Persistent identifier |
|
Record ID |
1188552201 |
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