Title |
Analysis of the basal plane dislocation density and thermomechanical stress during 100 mm PVT growth of 4H-SiC |
|---|---|
Involved |
Johannes Steiner (Verfasser)
Melissa Roder (Verfasser) Binh Duong Nguyen (Verfasser) Stefan Sandfeld (Verfasser) |
Published |
Freiburg: Universität |
Extent |
Online-Ressource |
Language |
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Country |
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Topic |
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Subject |
|
DDC notation |
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Persistent identifier |
urn:nbn:de:bsz:25-freidok-1501350 (URN) |
Further information |
issn: 1996-1944 |
Record ID |
1193422949 |
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