Title |
An analytical temperature-dependent design model for contour-mode MEMS resonators and oscillators verified by measurements / Johannes Stegner, Sebastian Gropp, Dmitry Podoskin, Uwe Stehr, Martin Hoffmann, Matthias Hein |
|---|---|
Involved |
Johannes Stegner (Verfasser)
Sebastian Gropp (Verfasser) Dmitry Podoskin (Verfasser) Uwe Stehr (Verfasser) |
Published |
Ilmenau: TU Ilmenau |
Extent |
Online-Ressource |
Language |
|
Country |
|
Topic |
|
Subject |
analytical models |
Persistent identifier |
urn:nbn:de:101:1-2019090506164362504020 (URN) |
Further information |
In: Sensors(18, 2018), H. 7 |
Record ID |
1194175147 |
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