Title |
Der Lau-Effekt in der lithographischen Mikro-Nanostrukturierung / Xinrui Cao, Patrick Feßer, David Fischer, Meike Hofmann, Yannick Bourgin, Stefan Sinzinger |
|---|---|
Involved |
Xinrui Cao (Verfasser)
Patrick Feßer (Verfasser) David Fischer (Verfasser) Meike Hofmann (Verfasser)
Yannick Bourgin (Verfasser)
Stefan Sinzinger (Verfasser) |
Published |
Ilmenau: TU Ilmenau |
Extent |
Online-Ressource |
Language |
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Country |
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Topic |
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Persistent identifier |
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Further information |
In: Erlangen-Nürnberg : Deutsche Gesellschaft für Angewandte Optik |
Record ID |
1194835570 |
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