Title |
Quantitative Elementanalytik an Diamantschichten mittels elastischer Vorwärtsstreuung (ERD) hochenergetischer schwerer Ionen / Andreas Bergmaier |
|---|---|
Involved |
Andreas Bergmaier (Verfasser) |
Published |
Aachen: Shaker |
Extent |
Online-Ressource, 106 Seiten : 42 Abb. |
ISBN |
978-3-8265-6987-6 |
Language |
|
Country |
|
Topic |
|
Subject |
Diamant, Dünne Schicht, Silicium, Halbleitersubstrat, Elastische Rückstreuanalyse, Schwerionenstrahl |
Series |
Berichte aus der Physik |
Persistent identifier |
|
Record ID |
1196489181 |
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