Title |
Theoretical investigation of scanning probe lithography in field-emission mode / Steve Lenk ; Gutachter: Dirk Lützenkirchen-Hecht, Timothy Groves ; Betreuer: Ivo W. Rangelow |
|---|---|
Involved |
Steve Lenk (Verfasser) |
Published |
Ilmenau: TU Ilmenau |
Extent |
Online-Ressource |
Thesis |
Dissertation, Ilmenau, TU Ilmenau, 2019 |
Language |
|
Country |
|
Topic |
|
Subject |
Miniaturisierung |
Persistent identifier |
|
Record ID |
1200353420 |
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