Title |
Enabling control of matter at the atomic level: atomic layer deposition and fluorocarbon-based atomic layer etching / Stefano Dallorto ; Gutachter: Adam Schwartzberg, Steffen Strehle ; Betreuer: Ivo W. Rangelow |
|---|---|
Involved |
Stefano Dallorto (Verfasser) |
Published |
Ilmenau: TU Ilmenau |
Extent |
Online-Ressource |
Thesis |
Dissertation, Ilmenau, TU Ilmenau, 2019 |
Language |
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Country |
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Topic |
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Subject |
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Persistent identifier |
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Record ID |
120306683X |
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