Title |
Einsatz von Polyelektrolyt-Multischichten für das temporäre Waferbonden / von Helena Dillmann |
|---|---|
Involved |
Helena Dillmann (Verfasser) |
Published |
Stuttgart: Fraunhofer Verlag |
Extent |
VII, 164 Seiten : Illustrationen |
Thesis |
Dissertation, Technische Universität Carolo-Wilhelmina Braunschweig, 2019 |
ISBN |
978-3-8396-1597-3 |
Language |
|
Country |
|
Topic |
|
Subject |
Wafer, Silicium, Dünne Schicht, Bonden, Polyelektrolyt, Zwischenschicht, Mehrschichtsystem, Ultraviolett-Bestrahlung, Fotokatalyse |
DDC notation |
|
Series |
|
Record ID |
1209368994 |
Please note
The beta version does not yet contain all functions and information of the DNB portal catalogue. If you are missing information or want to order a medium, please visit the page in the DNB portal catalogue via the following link: