Title |
Contact related failure detection of semiconductor layer stacks using an acoustic emission test method / Marianne Unterreitmeier |
|---|---|
Involved |
Marianne Unterreitmeier (Verfasser) |
Published |
Erlangen: FAU University Press |
Extent |
xxiv, 234 Seiten : Illustrationen, Diagramme |
Thesis |
Dissertation, Friedrich-Alexander-Universität Erlangen-Nürnberg, 2019 |
ISBN |
978-3-96147-305-2 |
Language |
|
Country |
|
Topic |
Elektrotechnik, Elektronik |
Subject |
Wafer, Halbleiterschicht, Schallemissionsanalyse, Rissbildung, Härteeindruck, Werkstoffschädigung, Halbleitertechnologie, Kontaktieren |
DDC notation |
|
Series |
FAU Forschungen. Reihe B, Medizin, Naturwissenschaft, Technik ; Band 33 |
Record ID |
1218552425 |
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