Title |
A lifting and actuating unit for a planar nanoprecision drive system / Stephan Gorges ; Gutachter: Christoph Schäffel, Bernd Hans Schmidt ; Betreuer: René Theska |
|---|---|
Involved |
Stephan Gorges (Verfasser) |
Published |
Ilmenau: TU Ilmenau |
Extent |
Online-Ressource |
Thesis |
Dissertation, Ilmenau, TU Ilmenau, 2020 |
Language |
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Country |
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Topic |
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Subject |
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DDC notation |
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Persistent identifier |
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Record ID |
1224416589 |
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