Title |
Nucleation Mechanism of Microcrystalline Silicon Studied by Real Time Spectroscopic Ellipsometry and Infrared Spectroscopy |
|---|---|
Involved |
Hiroyuki Fujiwara (Verfasser) |
Published in |
MRS online proceedings library 609, 1, 1.7.2000, date:12.1999, Seite 211-2112 |
Published |
2000 |
Language |
|
Country |
|
Topic |
|
Subject |
Materials Science, general.
Characterization and Evaluation of Materials. Nanotechnology. Inorganic Chemistry.
Materials Engineering.
Applied and Technical Physics. |
DDC notation |
|
Persistent identifier |
urn:nbn:de:101:1-2021011221164995451515 (URN) |
Record ID |
1224955412 |
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