Title |
Atmospheric pressure metal organic chemical vapor deposition of thin germanium films |
|---|---|
Involved |
Ronny Fritzsche (Verfasser) |
Published in |
Journal of materials science 56, 15, 16.2.2021, date:5.2021, Seite 9274-9286 |
Published |
2021 |
Language |
|
Country |
|
Topic |
|
Subject |
Materials Science, general.
Characterization and Evaluation of Materials. Polymer Sciences. Solid Mechanics.
Crystallography and Scattering Methods.
Classical Mechanics. |
DDC notation |
|
Persistent identifier |
urn:nbn:de:101:1-2021041522333140812290 (URN) |
Record ID |
1231531398 |
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