Title |
Scanning probe lithography on calixarene towards single-digit nanometer fabrication / Marcus Kästner, Ivo W. Rangelow |
|---|---|
Involved |
Marcus Kästner (Verfasser) |
Published |
Ilmenau: TU Ilmenau |
Extent |
Online-Ressource |
Language |
|
Country |
|
Topic |
|
Subject |
nanofabrication |
DDC notation |
|
Persistent identifier |
urn:nbn:de:101:1-2021070107284789595472 (URN) |
Further information |
In: International journal of extreme manufacturing(2, 2020), H. 3 |
Record ID |
1236346327 |
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