Title |
Effect of SiO 2 Interlayer Thickness in Au/SiO 2/Si Multilayer Systems on Si Sources and the Formation of Au‐Based Nanostructures |
---|---|
Involved |
Feitao Li (Verfasser) |
Published in |
Advanced materials interfaces 02.12.2021 |
Published |
02.12.2021 |
Language |
|
Country |
|
Subject |
Si active oxidation |
Persistent identifier |
urn:nbn:de:101:1-2021120214360491468053 (URN) |
Record ID |
1246914743 |
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