Title |
Computer generated holography for 3D lithographic illumination / David Fischer ; Stefan Sinzinger, Christoph Schierz, Andreas Heinrich |
|---|---|
Involved |
David Fischer (Verfasser) |
Published |
Ilmenau: TU Ilmenau |
Extent |
Online-Ressource |
Thesis |
Dissertation, Ilmenau, TU Ilmenau, 2021 |
Language |
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Country |
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Topic |
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Subject |
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DDC notation |
|
Persistent identifier |
urn:nbn:de:gbv:ilm1-2021000259 (URN) |
Record ID |
1248030486 |
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