Title |
From Fully Strained to Relaxed: Epitaxial Ferroelectric Al 1‐ x Sc x N for III‐N Technology |
|---|---|
Involved |
Georg Schönweger (Verfasser)
Adrian Petraru (Verfasser) Md Redwanul Islam (Verfasser) Niklas Wolff (Verfasser)
Benedikt Haas (Verfasser)
Adnan Hammud (Verfasser) Christoph Koch (Verfasser) Lorenz Kienle (Verfasser) Hermann Kohlstedt (Verfasser) Simon Fichtner (Verfasser) |
Published in |
Advanced functional materials 12.02.2022 |
Published |
12.02.2022 |
Language |
|
Country |
|
Subject |
aluminum‐scandium‐nitride (Al 1‐ xSc xN) |
Persistent identifier |
urn:nbn:de:101:1-2022021314005030651710 (URN) |
Record ID |
1251719295 |
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