Title |
Exploring nanowire regrowth for the integration of bottom-up grown silicon nanowires into AFM scanning probes / Arezo Behroudj, Parastoo Salimitari, Madeleine Nilsen, Steffen Strehle |
|---|---|
Involved |
Arezo Behroudj (Verfasser) |
Published |
Ilmenau: TU Ilmenau |
Extent |
Online-Ressource |
Language |
|
Country |
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Topic |
|
Subject |
nanowire |
DDC notation |
|
Persistent identifier |
urn:nbn:de:101:1-2022021506400316723301 (URN) |
Further information |
In: Journal of micromechanics and microengineering(31, 2021), H. 5 |
Record ID |
1251815502 |
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