Title |
Towards green 3D-microfabrication of Bio-MEMS devices using ADEX dry film photoresists / Michael M. Roos, Andreas Winkler, Madeleine Nilsen, Siegfried B. Menzel, Steffen Strehle |
|---|---|
Involved |
Michael M. Roos (Verfasser) |
Published |
Ilmenau: TU Ilmenau |
Extent |
Online-Ressource, 15 Seiten |
Language |
|
Country |
|
Topic |
|
Subject |
Dry film photoresist
Lithography 3D Microfabrication Microcantilevers
Lab-on-a-chip
Microprobes |
DDC notation |
|
Persistent identifier |
urn:nbn:de:101:1-2022052303071702447639 (URN) |
Further information |
In: International journal of precision engineering and manufacturing-green technology(9), H. 1, S.43-57 - ISSN 2198-0810 |
Record ID |
1258166046 |
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