Title |
Heterodyne standing-wave interferometer with improved phase stability / Ingo Ortlepp, Jens-Peter Zöllner, Ivo W. Rangelow, Eberhard Manske |
|---|---|
Involved |
Ingo Ortlepp (Verfasser) |
Published |
Ilmenau: TU Ilmenau |
Extent |
Online-Ressource, 10 Seiten |
Language |
|
Country |
|
Topic |
|
Subject |
Standing wave |
Persistent identifier |
urn:nbn:de:101:1-2022070403070118475283 (URN) |
Further information |
In: Nanomanufacturing and metrology(4), H. 3, S.190-199 - ISSN 2520-8128 |
Record ID |
1261737172 |
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